MEMS慣性傳感器優(yōu)勢(shì)解析
—— THELMA制程和低成本封裝方法
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參考文獻(xiàn)
[1] B. Vigna, “MEMS Epiphany,” MEMS 2009 Conference, Sorrento Italy, January
26, 2009.
[2] Source, iSuppli Corporation, See: http://www.isuppli.com
[3] B. De Masi and S. Zerbini, “Process builds more sensitive structures,” EE Times,
November 22, 2004.
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